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Beilstein J. Nanotechnol. 2021, 12, 304–318, doi:10.3762/bjnano.12.25
Figure 1: FIB-o-mat overview. (a) For patterning the beam spot follows a rasterized beam path with a defined ...
Figure 2: Geometric primitives and rasterization styles available for high-level pattern generation. (a) Sing...
Figure 3: Geometric entities and rasterization styles available for low-level pattern generation. (a) Pre-ras...
Figure 4: Geometry-optimized patterning. (a) Beam path generation by curve off-setting around arbitrary disco...
Figure 5: Magnetic nanopatterning of a Co/Pt multilayer. Fourier-transform holography (FTH) images (a–f) with...
Figure 6: Single-layer graphene resonator. (a) Secondary electron He ion microscopy image of the graphene res...
Figure 7: Coupled plasmonic antennas. (a–c) Scanning electron micrographs of gold tetramers on glass with a t...
Figure 8: Optimized tetramer. Secondary electron He ion microscopy images of gold tetramers on glass with min...